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Environmental SEM
Introduction to the Quanta FEG ESEM 200 (Environmental Scanning
Electron Microscope)
The uniqueness of the Environmental SEM is that it allows the user to
take unprepared and/or non-conductive samples, vary the environment
through a range of pressures, temperatures and gas-compositions, and
still be able to perform high resolution imaging and elemental analysis.
Capabilities
- Secondary electron imaging in a gas or water vapor to least 3.5 nm
- Imaging of wet samples with no dehydration
- Observation of the sample in its natural environment
- No sample preparation required even for insulating samples
- X-ray analysis on non-conductive samples
- Observation of dynamic experiments at high temperatures in a gas environment.
- Digital imagingreduce time-to-market and time-to-profit
Applications
- Sample Heating [amb. to +400oC - resistive heater]
- Sample Cooling - wet [+/- 20oC from amb.]
- Sample Exposure ¨C 0 to 98% Relative Humidity
- Sample Exposure - Different gases
- MicroInjection onto sample - liquids and gases
- Energy dispersive spectroscopy (EDS) with full xray mapping
- Mechanical testing
Specifications
Resolution: |
3.5 nm @ 30 kV |
High, low and ESEM vacuum mode |
15 nm @ 3 kV |
Low vacuum mode |
Magnification |
7x ¨C 1,000,000x |
High and low vacuum mode |
Accelerating Voltage: |
200 V to 30 kV |
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Stage Movement |
X, Y, and Z = 50 mm |
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Reservation Policies
ESEM is located in Building 89 (Martin Hall), Room 0122. The charge
per hour is $70, which does not include training. Approximately 2 hours
of training is required. Canceled reservations within 24 hours or
less will be charged for the first hour.
Point of Contact:
Click here to make reservation
Copyright © 2006 by CALCE and the University of Maryland, All Rights Reserved
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